China preparation of rare metal sputtering targets has broken the monopoly

- May 26, 2019-

Domestic target equipment status

At present, the preparation of high-end rare metal targets is mainly concentrated in Japan, the United States, Germany and other countries. The domestic and international gaps are concentrated in the upstream areas of sputtering targets (mainly in the field of ultra-high-purity raw materials) and new products serving the advanced processes of integrated circuits.



How Do Sputtering Targets Work

Results of domestic target equipment

In response to this situation, the laboratory team used smelting and plastic processing methods to prepare nickel-platinum, cobalt-chromium-platinum-boron and other targets, and prepared bismuth and cobalt-chromium-platinum silica targets by powder metallurgy. The nickel-platinum target micro-organism preferred orientation control technology, high-purity bismuth target batch preparation technology, brittle target composition control and defect control technology, and phase interface combined control technology of oxide target were developed.

Through the research and application of new technology, the main performance index of target products is 99.995wt%, the target component deviation is less than 0.5wt%, the target density is 98.5%, and the target and backsheet welding rate is 98.5%. . Among them, the research and development of nickel-platinum target in July this year broke the foreign monopoly, so that similar products have been replaced by imported products and exported to well-known semiconductor companies in the United States.



How Do Sputtering Targets Work?

It is also known that the coating target is a sputtering source for forming various functional films on the substrate by sputtering under appropriate process conditions by magnetron sputtering, multi-arc ion plating or other types of coating systems. To put it simply, the target is the target material for high-speed energy-energy particle bombardment. It is used in high-energy laser weapons. When different power densities, different output waveforms, and different wavelengths of lasers interact with different targets, different damage will occur. effect. For example, the evaporation magnetron sputtering coating is a heating evaporation coating, an aluminum film, or the like. Different film materials (such as aluminum, copper, stainless steel, titanium, nickel targets, etc.) can be obtained to obtain different film systems (such as super hard, wear-resistant, anti-corrosive alloy films, etc.).