Research progress of titanium-aluminum alloy sputter coating target
With the increasing awareness of environmental protection, the surface coating technology of materials has gradually transitioned from vacuum plating and electroless plating techniques to vacuum sputtering coating technology. Vacuum magnetron sputtering coating technology has been widely used in metal decorative coatings, surface protective coatings, electronic product coatings, electromagnetic shielding coatings, and automotive and architectural glass coatings. Therefore, the demand for related coating targets in this field is also extremely urgent.
Titanium-aluminum alloy is an alloy sputtering target for vacuum coating. In the preparation, titanium-aluminum alloy target with different characteristics can be obtained by blending titanium and aluminum. Titanium-aluminum intermetallic compound is a hard and brittle material with good wear resistance. It is coated with a layer of titanium-aluminum intermetallic compound on the surface of ordinary tools, which can effectively extend the service life of the tool. If the sputtering is carried out with nitrogen discharge arcing, a high hardness and low friction coefficient surface film can be obtained, which is especially suitable for the surface coating of various tools, molds and other wearing parts, and therefore has a good application prospect in the machining industry.
The preparation of titanium aluminum alloy targets is difficult. According to the phase diagram of titanium-aluminum alloy, titanium and aluminum can form a variety of metal compounds, resulting in the processing brittleness of titanium-aluminum alloy, especially when the aluminum content in the alloy exceeds 50% (atomic ratio), the oxidation resistance of the alloy suddenly Reduced, severe oxidation. At the same time, the exothermic expansion during the alloying process is prone to bubble, shrinkage and shrinkage, resulting in high porosity of the alloy, which cannot meet the requirements of target density.
According to the research on the production process of titanium-aluminum alloy targets at home and abroad, the main preparation techniques of titanium-aluminum alloy sputtering targets include: high current heating method, hot isostatic pressing method and hot pressing sintering method.